SYSTEMA EI Suite

Faced with continued demands on cost reduction as well as the increasing complexities associated with new technologies, the semiconductor manufacturing industry is focusing on predictive manufacturing through improved integration and automation of their manufacturing equipment. The SYSTEMA EI Suite enables IT organizations the ability to provide a new level of safe and efficient solutions that meet the challenges of today as well as of the future.

Overview

The SYSTEMA EI Suite is the result of countless hours of software engineering spread over the last two decades. Released to production in dozens of Fabs around the globe, the SYSTEMA EI Suite has a demonstrated history of flexibility, performance and reliability. With a modular design that is scalable on all common platforms your investment is well protected. Using industry standard integration technologies, the SYSTEMA EI Suite supports easy adaptation of Manufacturing Execution System (MES) applications.

Integration

SYSTEMA EI Suite

Following SEMI standards for SECS/GEM communication, the SYSTEMA Equipment Server (EQS) provides the communication interface between Fab equipment and the other components of the SYSTEMA EI Suite. The EQS provides the ability to control equipment setup and processing scenarios, as well as automated data collection. The SYSTEMA EQS Builder is provided to configure the EQS to meet local, equipment specific requirements.

Automation 

The MES is responsible for enabling the control of material processing throughout the manufacturing environment. The SYSTEMA Equipment Controller (EQC) used in conjunction with the MES provides the ability to extend this control to the Fab equipment level. The EQC includes a flexible and powerful framework capable of managing all processing steps from work flow automation through data warehousing. Through the use of the EQC’s integrated workflow management system, equipment automation is able to be standardized, facilitating more efficiency in automation engineering. Building on experience, the SYSTEMA EI Suite includes state models that support managing equipment components such as ports and chambers. Additionally, workflow templates are available for numerous equipment types, from single wafer / single port tools to batch processing / cluster tools.

Continuous Improvement 

Components within the SYSTEMA EI Suite may be reconfigured without being restarted, improving system availability and helping facilitate continuous improvements. Systemas Portfolio of Solutions and Expertise are significantly reducing the effort required to integrate and automate new equipment.
Workflows can be configured to support experiments and exception handling. Through dynamic workflows, solutions to many of today’s more complex requirements such as single wafer processing are being possible. Built in persistence allows application components or even an entire application to be restarted with minimal impact.
Components within the SYSTEMA EI Suite may be reconfigured without being restarted, improving system availability and helping facilitate continuous improvements.

SYSTEMA EI Suite continous improvement

Powerful Functionality 

Using the previously implemented models and templates will significantly reduce the effort required to integrate and automate new equipment. Workflows may be configured to the level of detail necessary to support processes such as experiments and exception handling. Through advanced techniques such as dynamic workflows, solutions to many of today’s more complex requirements such as single wafer processing are made possible. Built in persistence allows application components or even an entire application to be restarted with minimal impact.

SYSTEMA EI Suite JGui

Consistant Operation

The SYSTEMA EI Suite includes a graphical user interface for monitoring applications as well as controlling application components. This interface supports common user rights management and may be integrated into new applications. Using an automated workflow engine facilitates standardizing the material processing scenarios implemented throughout the Fab. Through this standardization the procedures followed by Operators become increasingly consistent, resulting in improved efficiencies.

Software Standards, SEMI

The SYSTEMA EI Suite implements the following standards:
E4-0699 (SECS-I), E5-0703 (SECS-II), E30-0703 (GEM), E37-0303 (HSMS), E37.1-0702 (HSMS-SS), E37.2-95 (HSMS-GS), SEMATECH VFEI 2.2 (951130A-TR), Industry standard TCP/IP, Ethernet (IEEE 803.3) and EIA RS232-C

 

For further information regarding the SYSTEMA EI Suite please contact us.